Elastic recoil detection analysis (ERDA) of thick films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 129, Issue 4, 1997, Pages 501-510

  Plamann, K ^a   Behrisch, R ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COMPUTATIONAL METHODS; ION BEAMS; MATHEMATICAL MODELS; PARTICLE DETECTORS; SURFACE MEASUREMENT; THICK FILMS;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA);

SURFACE STRUCTURE;

EID: 0031233197     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00324-8     Document Type: Article

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