Diffractive microlens array monolithic integration with PtSi focal plane array

International Journal of Infrared and Millimeter Waves

Volumn 21, Issue 9, 2000, Pages 1417-1425

  Li, Yi ^a   Yi, Xinjian ^a   Cai, Liping ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTIVE OPTICS; ETCHING; GAMMA RAYS; INFRARED RADIATION; ION BEAM LITHOGRAPHY; ION BEAMS; LENSES; PHOTOLITHOGRAPHY; PLATINUM ALLOYS; RADIATION HARDENING; SPURIOUS SIGNAL NOISE;

DIFFRACTIVE MICROLENSES; FOCAL PLANE ARRAY; ION BEAM ETCHING;

PHOTODETECTORS;

EID: 0034274044     PISSN: 01959271     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1026452923272     Document Type: Article

References (9)

1. Madeleine B. Fleming, M. C. Hutley, Appl. Opt. 36(1997), 4635.
2. M. Edward Motamedi, Ming C. Wu, Kristofer S. J. Pister, Opt. Eng. 36(1997), 1282.
3. M. Edward Motamedi, William E. Tennant et al, Opt. Eng. 36(1997), 1374.
4. LiYi, Yi Xinjian, Hao Jianhua, Proc. SPIE, 3545(1998), 210.
5. M.B. Stern, W.F. Delaney, M. Holz et al., Mat. Res. Soc. Symp. Proc. 216(1991), 107.
6. Li Yi, Yi Xinjian, Hao Jianhua, Proc. SPIE, 3557(1998), 143.
7. M. E. Motamedi, W. J. Gunning, M. P. Griswold, and R. E. Knowlden, Proc. SPIE, 1544(1991), 22.
8. L. J. Kozlowski, J. M. Arias, G. M. Williams et al., Proc. SPIE, 2274(1994), 93.
9. D. A. Buralli, G. M. Morris, and J. R. Rogers. Appl. Opt. 28(1989), 976.