Design and fabrication of 256×256 diffractive microlens arrays on Si substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3557, Issue , 1998, Pages 143-148

  Li, Yi ^a   Yi, Xinjian ^a   Hao, Jianhua ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTIVE OPTICS; ETCHING; ION BEAMS; PHOTOLITHOGRAPHY; SILICON;

DIFFRACTIVE MICROLENS ARRAY;

OPTICAL INSTRUMENT LENSES;

EID: 0032300975     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)