Micro-optic integration with focal plane arrays

Optical Engineering

Volumn 36, Issue 5, 1997, Pages 1374-1381

  Motamedi, M Edward ^a,b   Tennant, William E ^{a,c,d,e,f,g,h}   Sankur, Haluk O ^a,e,i,j   Melendes, Robert ^a,e   Gluck, Natalie S ^a,i,k,l,m   Park, Sangtae ^a,e,f,n   Arias, Jose M ^a,e,o   Bajaj, Jagmohan ^a,f,h,p,q   Pasko, John G ^a,e,r   McLevige, William V ^a,s,t,u,v,w   Zandian, Majid ^a,x,y,z   Hall, Randolph L ^a,e,s,aa,ab   Richardson, Patricia D ^a,ac,ad  

^a ROCKWELL SCIENCE CENTER   (United States)

^b International Society for Optics and Photonics   (United States)

^c HARVARD UNIVERSITY   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

^e Science Center

^f IEEE

^g Sigma Xi   (United States)

^h AMERICAN PHYSICAL SOCIETY   (United States)

ⁱ CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^j HEWLETT PACKARD COMPANY   (United States)

^k Department of Obstetrics Gynecology   (United States)

^l Materials Research Society   (United States)

^m OPTICAL SOCIETY OF AMERICA   (United States)

ⁿ Cornell University   (United States)

^o UNIVERSITY OF CALIFORNIA   (United States)

^p NORTHWESTERN UNIVERSITY   (United States)

^q MCT Process Line

^r RUTGERS UNIVERSITY   (United States)

^s UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^t SANDIA NATIONAL LABORATORIES   (United States)

^u TEXAS INSTRUMENTS   (United States)

^v Technical Staff

^w Rockwell's Microlectron R D Ctr   (United States)

^x UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

^y Center for Photonic Technology   (United States)

^z USC ^*

^aa PURDUE UNIVERSITY   (United States)

^ab Optical Development Group   (United States)

^ac P and H Laboratories

^ad Microwave Monolithics ^*

more..

Author keywords

Binary optics; Focal plane array; Hybridization; Infrared; Micro optic; Micro opto electro mechanical systems; Miniaturization

Indexed keywords

EID: 6944242636     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601347     Document Type: Article

References (11)

1. M. E. Motamedi, W. J. Gunning, M. P. Griswold, and R. E. Knowlden, "Silicon microlenses for enhanced optical coupling to silicon focal planes," Proc. SPIE 1544, 22-32 (July 1991).
2. G. J. Swanson, "Binary optics technology: the theory and design of multi-level diffraction optical elements," Tech. Report 854, Lincoln Laboratory, MIT (14 Aug. 1989).
3. M. E. Motamedi, "Micro-opto-electro-mechanical systems," (invited paper), Opt. Eng. 33(11), 3505-3517 (Nov. 1994).
4. H. Sankur, R. Hall, E. Motamedi, W. Gunning, and W. Tennant, "Fabrication of microlens arrays by reactive ion milling," Proc. SPIE 2687, 150 (Feb. 1996).
5. J. M. Arias, M. Zandian, J. G. Pasko, J. Bajaj, L. J. Kozlowski, W. E. Tennant, and R. E. DeWames, "MBE HgCdTe infrared focal plane array (IRFPA) flexible manufacturing," Proc. SPIE 2274, 2-16 (1994).
6. J. M. Arias, "Growth of HgCdTe by molecular-beam epitaxy," in Properties of Narrow Gap Cadmium-Based Compounds, P. Capjper, Ed., EMIS Datareview Series No. 10, Inspec Publication, pp. 30-35 (1994).
7. L. J. Kozlowski, J. M. Arias, G. M. Williams, K. Vural, D. E. Cooper, S. A. Cabelli, and C. Bruce, "Recent advances in staring hybrid focal plane arrays: comparison of HgCdTe, InGaAs, and GaAs/AlGaAs detector technologies," Proc. SPIE 2274, 93-116 (1994).
8. L. J. Kozlowski, "Overview of present-day infrared focal plane arrays," presented at 1995 Conference on Lasers and Electro-optics (CLEO), Baltimore, MD, May 22-27.
9. M. E. Motamedi, W. H. Southwell, R. J. Anderson, W. J. Gunning, and M. Holz, "High speed binary microlens in GaAs," Proc. SPIE 1544, 33-44 (July 1991).
10. R. L. Hall, W. H. Southwell, and W. J. Gunning, "Ellipsometry as a real-time deposition monitor," Proc. SPIE (1987).
11. M. E. Motamedi, B. Anderson, R. De La Rosa, W. J. Gunning, R. Hall, and M. Khoshnevisan, "Binary optics thin film microlens array," Proc. SPIE 1544, 22-32 (July 1992).