Design and fabrication of 128×128 diffractive microlens arrays for infrared focal plane arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3545, Issue , 1998, Pages 210-213

  Li, Yi ^a   Yi, Xinjian ^a   Hao, Jianhua ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTIVE OPTICS; ETCHING; INFRARED IMAGING; ION BEAM LITHOGRAPHY; LENSES; PHOTOLITHOGRAPHY; SILICON WAFERS;

DIFFRACTIVE MICROLENSES; INFRARED FOCAL PLANE ARRAYS;

INFRARED DETECTORS;

EID: 0032299342     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)