Design and testing of a fast tool servo for diamond turning

Precision Engineering

Volumn 7, Issue 3, 1985, Pages 123-128

  Patterson, S R ^a   Magrab, E B ^b  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

accuracy; diamond tools; piezoelectric actuator; resolution; servosystems

Indexed keywords

EID: 0000215664     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/0141-6359(85)90030-3     Document Type: Article

References (6)

1. Design and construction of a large, vertical-axis diamond turning machine
2. The motion control system for the large optics diamond turning machine LODTM
3. Piezodriven 50 micrometer range stage with subnanometer resolution
4. The application of capacitance micrometry to the control of Fabry-Perot etalons
5. A stable, rugged, capacitance-stabilized piezoelectric scanned Fabry-Perot etalon
6. Low noise broadband modulated preamplifiers for a variety of transducers