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Volumn 39, Issue 1, 1990, Pages 375-378
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A New Micro-Cutting Device with High Stiffness and Resolution
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Author keywords
contact sensor; diamond cutting; microcutting; nm resolution; piezo electric element
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Indexed keywords
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EID: 58149205881
PISSN: 00078506
EISSN: 17260604
Source Type: Journal
DOI: 10.1016/S0007-8506(07)61076-2 Document Type: Article |
Times cited : (38)
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References (8)
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