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Volumn 21, Issue 9, 2000, Pages 385-387

Limitation of the Kirchhoff boundary conditions for aerial image simulation in 157-nm optical lithography

Author keywords

[No Author keywords available]

Indexed keywords

ATTENUATION; BOUNDARY CONDITIONS; CHROMIUM; COMPUTATIONAL METHODS; COMPUTER SIMULATION; ELECTROMAGNETIC WAVE DIFFRACTION; IMAGE ANALYSIS; IMAGE QUALITY; LIGHT ABSORPTION; LIGHT POLARIZATION; PHOTOLITHOGRAPHY;

EID: 0034258866     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (12)

References (15)
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  • 4
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  • 5
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    • Rigorous simulation of mask corner effects in extreme ultraviolet lithography
    • T. V. Pistor, K. Adam, and A. Neureuther, "Rigorous simulation of mask corner effects in extreme ultraviolet lithography," J. Vac. Sci. Technol. B, vol. 16, pp. 3449-3455, 1998.
    • (1998) J. Vac. Sci. Technol. B , vol.16 , pp. 3449-3455
    • Pistor, T.V.1    Adam, K.2    Neureuther, A.3
  • 6
    • 0010262256 scopus 로고
    • Intensity optimization for phase shifting masks
    • K. D. Lucas, A. J. Strojwas, K. K. Low, and C.-M. Yuan, "Intensity optimization for phase shifting masks," Proc. SPIE, vol. 1927, pp. 438-449, 1992.
    • (1992) Proc. SPIE , vol.1927 , pp. 438-449
    • Lucas, K.D.1    Strojwas, A.J.2    Low, K.K.3    Yuan, C.-M.4
  • 7
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    • Rigorous three-dimensional time-domain finite-difference electromagnetic simulation for photolithographic applications
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    • (1995) IEEE Trans. Semiconduct. Manufact. , vol.8 , pp. 419-431
    • Wong, A.K.1    Neureuther, A.R.2
  • 8
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    • Practical topography design for alternating phase-shifting masks
    • S. Tanaka, H. Nakamura, K. Kawano, and S. Inoue, "Practical topography design for alternating phase-shifting masks," Proc. SPIE, vol. 2726, pp. 473-484, 1996.
    • (1996) Proc. SPIE , vol.2726 , pp. 473-484
    • Tanaka, S.1    Nakamura, H.2    Kawano, K.3    Inoue, S.4
  • 11
    • 0033140195 scopus 로고    scopus 로고
    • Incident wave source for finite-difference time-domain computation of electromagnetic scattering for objects embedded in layered dispersive media
    • M. S. Yeung, "Incident wave source for finite-difference time-domain computation of electromagnetic scattering for objects embedded in layered dispersive media," J. Sci. Comput., vol. 14, pp. 121-145, 1999.
    • (1999) J. Sci. Comput. , vol.14 , pp. 121-145
    • Yeung, M.S.1
  • 12
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    • Multilayered media Green's functions in integral equation formulation
    • K. A. Michalski and J. R. Mosig, "Multilayered media Green's functions in integral equation formulation," IEEE Trans. Antennas Propagat., vol. 45, pp. 508-519, 1997.
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    • Michalski, K.A.1    Mosig, J.R.2
  • 13
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    • Three-dimensional mask transmission simulation using a single integral equation method
    • M. S. Yeung and E. Barouch, "Three-dimensional mask transmission simulation using a single integral equation method," Proc. SPIE, vol. 3334, pp. 704-713, 1998.
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    • Yeung, M.S.1    Barouch, E.2
  • 14
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.