Three-dimensional mask transmission simulation using a single integral equation method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3334, Issue , 1998, Pages 704-713

  Yeung, Michael S ^a   Barouch, Eytan ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

Dyadic Green's functions; Photolithography simulation; Single integral equation

Indexed keywords

DIFFERENTIAL EQUATIONS; FUNCTIONS; INTEGRAL EQUATIONS; PROBABILITY DENSITY FUNCTION; THREE DIMENSIONAL;

DIELECTRIC OBJECTS; DYADIC GREEN'S FUNCTIONS; INTEGRAL EQUATION (IE) FORMULATION; INTEGRAL EQUATION METHOD (IEM); MASK FEATURES; MASK SIMULATION; PHOTOLITHOGRAPHY SIMULATION; SINGLE INTEGRAL EQUATION; THREE DIMENSIONAL (3D);

GREEN'S FUNCTION;

EID: 0002870891     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.310803     Document Type: Conference Paper

References (9)

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