Impact of cobalt silicidation on the low-frequency noise behavior of shallow p-n junctions

IEEE Electron Device Letters

Volumn 21, Issue 8, 2000, Pages 408-410

  Lukyanchikova, N B ^a   Petrichuk, M V ^a   Garbar, N ^a   Simoen, E ^b   Poyai, A ^b,c   Claeys, C ^b,c  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

^b IMEC   (Belgium)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT; CURRENT VOLTAGE CHARACTERISTICS; SEMICONDUCTING SILICON; SUBSTRATES;

SILICIDATION;

SEMICONDUCTOR JUNCTIONS;

EID: 0034246456     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.852966     Document Type: Article

References (12)

1. C. M. Osburn, J. Y. Tsai, and J. Sun, "Metal silicides: Active elements of ULSI contacts," J. Electron Mater., vol. 25, pp. 1725-1739, 1996.
2. +-n junctions," J. Vac. Sci. Technol. B, vol. 14, pp. 236-241, Jan./Feb. 1995.
3. 2 layer," IEEE Trans. Electron Devices, vol. 44, pp. 526-534, Apr. 1997.
4. + / p junctions," J. Appl. Phys., vol. 63, pp. 1990-1999, Mar. 1988.
5. J. Lin, S. Banerjee, J. Lee, and C. Teng, "Anomalous current-voltage behavior in titanium-silicided shallow source/drain junctions," J. Appl. Phys., vol. 68, pp. 1082-1087, Aug. 1990.
6. +p junction diodes," Appl. Phys. Lett., vol. 66, pp. 2507-2509, May 1995.
7. +p diodes," Solid-State Electron., vol. 41, pp. 901-908, June 1997.
8. T. G. M. Kleinpenning, "1 / f noise in p-n junction diodes," J. Vac. Sci. Technol. A, vol. 3, pp. 176-182, Jan./Feb. 1985.
9. N. B. Lukyanchikova, "New "universal" relation concerning 1 / f noise," Phys. Lett. A, vol. 180, pp. 285-288, 1993.
10. A. van der Ziel, "The surface recombination model of p-n diode flicker noise," Physica, vol. 48, pp. 242-246, 1970.
11. +-p silicon diodes," IEEE Trans. Electron Devices, vol. 45, pp. 2528-2536, Dec. 1998.
12. E. Gaubas, E. Simoen, C. Claeys, and J. Vanhellemont, "Perpendicular excitation-probe microwave absorption technique for carrier lifetime analysis in layered Si structures," Mater. Sci. Eng. B, vol. 73, pp. 1-6, Apr. 2000.