Reliability of silicon nitride as structural material in MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3875, Issue , 1999, Pages 174-183

  Kazinczi, R ^a   Mollinger, J R ^a   Bossche, A ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

AGING OF MATERIALS; ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; FAILURE (MECHANICAL); FATIGUE OF MATERIALS; MECHANICAL PROPERTIES; MULTILAYERS; RELIABILITY; SILICON NITRIDE;

ACCELERATED AGING TEST; MICROMECHANICAL STRUCTURES;

MICROELECTROMECHANICAL DEVICES;

EID: 0033315329     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)