Compositional analysis of amorphous SiNx:H films by ERDA and infrared spectroscopy

Surface and Interface Analysis

Volumn 30, Issue 1, 2000, Pages 534-537

  Bohne, W ^a   Fuhs, W ^a   Rohrich J ^a   Selle, B ^a   Gonzalez Diaz G ^b   Martil I ^b   Martinez F L ^b   Del Prado, A ^b  

^a HAHN MEITNER INSTITUT   (Germany)

^b UNIVERSIDAD COMPLUTENSE DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; FILM GROWTH; HYDROGEN BONDS; INFRARED SPECTROSCOPY; ION BEAMS;

HEAVY ION ELASTIC RECOIL DETECTION; MASS SEPARATION;

AMORPHOUS FILMS;

EID: 0034245098     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/1096-9918(200008)30:1<534::AID-SIA832>3.0.CO;2-C     Document Type: Article

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