Electron-stimulated desorption of hydrogen from H/Si(001)-1×1 surface studied by time-of-flight elastic recoil detection analysis

Surface Science

Volumn 420, Issue 1, 1999, Pages 81-86

  Fuse, Takashi ^a   Fujino, Toshiaki ^a   Ryu, Jeong Tak ^a   Katayama, Mitsuhiro ^a   Oura, Kenjiro ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Electron solid interactions, scattering, diffraction; Electron stimulated desorption (ESD); Hydrogen; Ion scattering spectroscopy; Low energy ion scattering (LEIS); Silicon

Indexed keywords

BAND STRUCTURE; CRYSTAL ORIENTATION; DESORPTION; ELECTRON DIFFRACTION; ELECTRON SCATTERING; HYDROGEN; ION BEAMS; SPECTROSCOPIC ANALYSIS; SURFACE STRUCTURE;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA); ELECTRON-SOLID INTERACTIONS; ELECTRON-STIMULATED DESORPTION; LOW ENERGY ION SCATTERING (LEIS) SPECTROSCOPY;

SEMICONDUCTING SILICON;

EID: 0032783810     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(98)00827-9     Document Type: Article

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