SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 53, Issue 1, 2000, Pages 349-352

Study of electron forward scattering effects on the footwidth of T-gates fabricated using a bilayer of PMMA and UVIII

(3) Chen, Y a Macintyre, D a Thoms, S a

a UNIVERSITY OF GLASGOW (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRON BEAM LITHOGRAPHY; GATES (TRANSISTOR); INTEGRATED CIRCUIT MANUFACTURE; MONTE CARLO METHODS; PHOTORESISTS; POLYMETHYL METHACRYLATES; SEMICONDUCTING GALLIUM ARSENIDE;

ELECTRON FORWARD SCATTERING EFFECTS; ELECTRON FORWARD SCATTERING IN THE HEAD LAYER; ENERGY DISTRIBUTION FUNCTION;

ELECTRON SCATTERING;

EID: 0034207249 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/S0167-9317(00)00331-2 Document Type: Article

Times cited : (7)

References (14)

1
- 0032272325
- 1. T. Suemitsu, T. Ishii, H. Yokoyama, Y. Umeda, and T. Enoki, et al, IEDM98, 223 (1998).
- (1998) IEDM98 , pp. 223
- Suemitsu, T.¹ Ishii, T.² Yokoyama, H.³ Umeda, Y.⁴ Enoki, T.⁵

2
- 0000294939
- 2. B.E. Maile, J. Vac. Sci. Technol. B 11, 2502 (1993)
- (1993) J. Vac. Sci. Technol. B , vol.11 , pp. 2502
- Maile, B.E.¹

3
- 0033077842
- 3. Y. Chen, D.S. McIntyre, S. Thoms, Electronics Letters, 35, 338, (1999)
- (1999) Electronics Letters , vol.35 , pp. 338
- Chen, Y.¹ McIntyre, D.S.² Thoms, S.³

4
- 0020829427
- 4. D. F. Kyser, J. Vac. Sci. Technol. B 1, 1391 (1983).
- (1983) J. Vac. Sci. Technol. B , vol.1 , pp. 1391
- Kyser, D.F.¹

5
- 0001396597
- 5. M.A. McCord, A. Wagner, and T. Donohue, J. Vac. Sci. Technol. B 11, 2958 (1993).
- (1993) J. Vac. Sci. Technol. B , vol.11 , pp. 2958
- McCord, M.A.¹ Wagner, A.² Donohue, T.³

6
- 0027625681
- 6. B. Houli, V. Umansky and M. Helblum, Semicond. Sci. Technol. 8, 1490 (1993).
- (1993) Semicond. Sci. Technol. , vol.8 , pp. 1490
- Houli, B.¹ Umansky, V.² Helblum, M.³

7
- 0000821527
- 7. E. A. Dobisz, C. R. K. Marrian, R. E. Salvino, M. A. Ancona, and F. K. Perkins, J. Vac. Sci. Technol. B 11, 2733 (1993).
- (1993) J. Vac. Sci. Technol. B , vol.11 , pp. 2733
- Dobisz, E.A.¹ Marrian, C.R.K.² Salvino, R.E.³ Ancona, M.A.⁴ Perkins, F.K.⁵

8
- 0030283962
- 8. C. R. K. Marrian, F. K. Perkins, D. Park, E. A. Dobisz, and M. C. Peckerar, et al, J. Vac. Sci. Technol. B 14, 3864 (1996).
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 3864
- Marrian, C.R.K.¹ Perkins, F.K.² Park, D.³ Dobisz, E.A.⁴ Peckerar, M.C.⁵

9
- 0001318692
- 9. E. A. Dobisz and C. R. K. Marrian, J. Vac. Sci. Technol. B 15, 2327 (1997).
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 2327
- Dobisz, E.A.¹ Marrian, C.R.K.²

10
- 0018543173
- 10. J.S. Greeneich, J. Vac. Sci. Technol. 16, 1749 (1979)
- (1979) J. Vac. Sci. Technol. , vol.16 , pp. 1749
- Greeneich, J.S.¹

11
- 0029776658
- 11. N. Glezos and I. Raptis, IEEE Trans. Computer-aided Design of Integrated Circuits and Systems, 15, 92 (1996)
- (1996) IEEE Trans. Computer-aided Design of Integrated Circuits and Systems , vol.15 , pp. 92
- Glezos, N.¹ Raptis, I.²

12
- 0016572881
- 12. T. H. P. Chang, J. Vac. Sci. Technol. 12, 1271 (1975).
- (1975) J. Vac. Sci. Technol. , vol.12 , pp. 1271
- Chang, T.H.P.¹

13
- 0021185394
- 13. C. Dix, P.G. Flavin, P. Hendy, and M. E. Jones, J. Vac. Sci. Technol. B 3, 131 (1985).
- (1985) J. Vac. Sci. Technol. B , vol.3 , pp. 131
- Dix, C.¹ Flavin, P.G.² Hendy, P.³ Jones, M.E.⁴

14
- 21544478941
- 14. S.P. Beaumont, P.G. Bower, T. Tamamura and C.D.W. Wilkinson, Appl. Phys. Lett. 38, 436 (1981)
- (1981) Appl. Phys. Lett. , vol.38 , pp. 436
- Beaumont, S.P.¹ Bower, P.G.² Tamamura, T.³ Wilkinson, C.D.W.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.