Initiation toughness of silicon/glass anodic bonds

Acta Materialia

Volumn 48, Issue 3, 2000, Pages 735-744

  Dunn, Martin L ^a   Cunningham, Shawn J ^b   Labossiere, Paul E W ^a  

^a UCB 450   (United States)

^b Ford Microelectronics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOND STRENGTH (MATERIALS); BRITTLE FRACTURE; FRACTURE TOUGHNESS; GLASS; SILICON; STRESS ANALYSIS;

ANODIC BONDS;

INTERFACES (MATERIALS);

EID: 0033896042     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6454(99)00352-3     Document Type: Article

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