Silicon thermal flow sensors

Sensors and Actuators: A. Physical

Volumn 30, Issue 1-2, 1992, Pages 5-26

  van Oudheusden, B W ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; FLOW OF FLUIDS; SILICON SENSORS; TRANSDUCERS; VELOCITY MEASUREMENT;

HOT OBJECT COOLING EFFECT; MASS FLOW RATE; THERMAL FLOW SENSOR; TRANSDUCTION PATH;

FLOWMETERS;

EID: 0026435104     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(92)80192-6     Document Type: Article

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