Low temperature deposition of functional coatings in a high density plasma

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1998, Pages 94-97

  Li, F ^a   Lin, C T ^a   Mantei, T D ^a  

^a UNIVERSITY OF CINCINNATI   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; COLOR; CORROSION RESISTANCE; ELECTRON CYCLOTRON RESONANCE; FILM GROWTH; HARDNESS; MICROWAVES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICA; TRANSPARENCY;

HEXAMETHYLCYCLOTRISILOXANE; HEXAMETHYLDISILOXANE; TETRAETHOXYSILANE;

PROTECTIVE COATINGS;

EID: 0031632381     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)