A highly sensitive silicon chip microtransducer for air flow and differential pressure sensing applications

Sensors and Actuators

Volumn 11, Issue 1, 1987, Pages 63-72

  Johnson, R G ^a   Higashi, R E ^a  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PRESSURE MEASUREMENT - SENSORS; SEMICONDUCTING SILICON - APPLICATIONS; TRANSDUCERS;

AIR FLOW; DIFFERENTIAL PRESSURE SENSING; SILICON CHIP MICROTRANSDUCER;

FLOW OF FLUIDS;

EID: 0023090035     PISSN: 02506874     EISSN: None     Source Type: Journal    
DOI: 10.1016/0250-6874(87)85005-9     Document Type: Article

References (6)

1. Monolithic integrated direction-sensitive flow sensor
2. Pyroelectric anemometers: preparation and flow velocity measurements
3. Fabrication of novel three-dimensional microstructures by the anisotropic etching of (100) and (110) silicon
4. Anisotropic etching of silicon
5. Dynamic micromechanics on silicon techniques and devices
6. Design and packaging of a highly sensitive microtransducer for air flow and differential pressure sensing applications