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Journal of Micromechanics and Microengineering

Volumn 4, Issue 4, 1994, Pages 227-245

Towards integrated microliquid handling systems

(4) Elwenspoek, M a Lammerink, T S J a Miyake, R a Fluitman, J H J a

a UNIVERSITY OF TWENTE (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DOSAGE SYSTEMS; FLUID INJECTION ANALYSIS; INTEGRATED MICROLIQUID HANDLING SYSTEMS; MICROFLOW SENSORS; MICROMIXERS; MICROPLUMES; MICROPUMPS; OPTICAL DETECTORS;

ACTUATORS; LIQUIDS; MICROMACHINING; MIXERS (MACHINERY); MIXING; PUMPS; SENSORS; SILICON WAFERS; VALVES (MECHANICAL);

MICROELECTROMECHANICAL DEVICES;

EID: 0028728336 PISSN: 09601317 EISSN: None Source Type: Journal
DOI: 10.1088/0960-1317/4/4/008 Document Type: Article

Times cited : (155)

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