메뉴 건너뛰기




Volumn 40, Issue 1, 2000, Pages 37-47

Influence of gate oxide breakdown on MOSFET device operation

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN OF SOLIDS; GATES (TRANSISTOR); LEAKAGE CURRENTS; OXIDES; SEMICONDUCTOR DEVICE MODELS; THERMOANALYSIS;

EID: 0033874101     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0026-2714(99)00204-8     Document Type: Article
Times cited : (22)

References (16)
  • 1
    • 0030242886 scopus 로고    scopus 로고
    • Soft breakdown of ultra-thin gate oxide layers
    • Depas M, Nigam T, Heyns MM. Soft breakdown of ultra-thin gate oxide layers. IEEE Trans on ED 1996;43(9):1499.
    • (1996) IEEE Trans on ED , vol.43 , Issue.9 , pp. 1499
    • Depas, M.1    Nigam, T.2    Heyns, M.M.3
  • 2
    • 0028755085 scopus 로고
    • Quasi-breakdown of ultrathin gate oxide under high field stress
    • Lee S, Cho B, Kim J, Choi S. Quasi-breakdown of ultrathin gate oxide under high field stress. IEDM Techn Digest 1994;605.
    • (1994) IEDM Techn Digest , pp. 605
    • Lee, S.1    Cho, B.2    Kim, J.3    Choi, S.4
  • 6
    • 84920716376 scopus 로고    scopus 로고
    • Random telegraph signal in the quasi-breakdown current of MOS capacitors
    • Brière O, Chroboczek JA, Ghibaudo G. Random telegraph signal in the quasi-breakdown current of MOS capacitors. ESSDERC'96 1996;759.
    • (1996) ESSDERC'96 , pp. 759
    • Brière, O.1    Chroboczek, J.A.2    Ghibaudo, G.3
  • 8
    • 0031144245 scopus 로고    scopus 로고
    • Definition of dielectric breakdown for ultra thin (< 2 nm) gate oxides
    • Depas M, Nigam T, Heyns MM. Definition of dielectric breakdown for ultra thin (< 2 nm) gate oxides. Solid State Electr 1997;41(5):725.
    • (1997) Solid State Electr , vol.41 , Issue.5 , pp. 725
    • Depas, M.1    Nigam, T.2    Heyns, M.M.3
  • 12
    • 85067381485 scopus 로고
    • Self-consistent simulation of hot-carrier damage enhanced gate induced drain leakage
    • v Schwerin A, Bergner W, Jacobs H. Self-consistent simulation of hot-carrier damage enhanced gate induced drain leakage. 1992 IEDM Techn Digest 1992;543.
    • (1992) 1992 IEDM Techn Digest , pp. 543
    • V Schwerin, A.1    Bergner, W.2    Jacobs, H.3
  • 13
    • 0032204912 scopus 로고    scopus 로고
    • On the properties of gate and substrate current after soft breakdown in ultrathin oxide layers
    • Crupi F, Degraeve R, Groeseneken G, Nigam T, Maes HE. On the properties of gate and substrate current after soft breakdown in ultrathin oxide layers. IEEE Trans ED 1998;45(11):2329.
    • (1998) IEEE Trans ED , vol.45 , Issue.11 , pp. 2329
    • Crupi, F.1    Degraeve, R.2    Groeseneken, G.3    Nigam, T.4    Maes, H.E.5
  • 14
    • 0032266438 scopus 로고    scopus 로고
    • Structural dependence of dielectric breakdown in ultrathin gate oxides and its relationship to soft breakdown modes and device failure
    • Wu E, Nowak E, Aitken J, Abadeer W, Han LK, Lo S. Structural dependence of dielectric breakdown in ultrathin gate oxides and its relationship to soft breakdown modes and device failure. IEDM Techn Digest 1998.
    • (1998) IEDM Techn Digest
    • Wu, E.1    Nowak, E.2    Aitken, J.3    Abadeer, W.4    Han, L.K.5    Lo, S.6
  • 15
    • 0031187932 scopus 로고    scopus 로고
    • Breakdown characteristics of ultra thin gate oxides following field and temperature stresses
    • Brière O, Halimaoui A, Ghibaudo G. Breakdown characteristics of ultra thin gate oxides following field and temperature stresses. Solid-State Electronics 1997;41(7):981.
    • (1997) Solid-State Electronics , vol.41 , Issue.7 , pp. 981
    • Brière, O.1    Halimaoui, A.2    Ghibaudo, G.3
  • 16
    • 33744905856 scopus 로고
    • Mechanism for stress-induced leakage currents in thin silicon dioxide films
    • DiMaria DJ, Cartier E. Mechanism for stress-induced leakage currents in thin silicon dioxide films. J Appl Phys 1995;78(6):3883.
    • (1995) J Appl Phys , vol.78 , Issue.6 , pp. 3883
    • DiMaria, D.J.1    Cartier, E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.