Interaction of self-assembled Ge islands and adjacent Si layers grown on unpatterned and patterned Si(001) substrates

Journal of Electronic Materials

Volumn 29, Issue 5, 2000, Pages 570-576

  Kamins, T I ^a   Basile, D P ^b  

^a HEWLETT PACKARD LABORATORIES   (United States)

^b AGILENT LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MULTILAYERS; SEMICONDUCTOR GROWTH; SILICON WAFERS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

SELF-ASSEMBLED ISLANDS; SPACER LAYERS;

SEMICONDUCTING GERMANIUM;

EID: 0033752375     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-000-0047-y     Document Type: Article

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