Wafer level packaging of silicon pressure sensors

Sensors and Actuators, A: Physical

Volumn 82, Issue 1, 2000, Pages 229-233

  Krassow, H ^a   Campabadal, F ^a   Lora Tamayo, E ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CROSSLINKING; ELASTOMERS; MASKS; PHOTOLITHOGRAPHY; PRESSURE TRANSDUCERS; SILICON WAFERS; SILICONES; ULTRAVIOLET RADIATION;

PRESSURE SENSORS;

SILICON SENSORS;

EID: 0033752127     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00334-9     Document Type: Article

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