The smart-orifice meter: A mini head meter for volume flow measurement

Flow Measurement and Instrumentation

Volumn 10, Issue 2, 1999, Pages 109-115

  Krassow, H ^a   Campabadal, F ^a   Lora Tamayo, E ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Computational fluid mechanics; Differential pressure meter; Orifice flow meter; Silicon microsensor

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; FLOW MEASUREMENT; NOZZLES; ORIFICES; PRESSURE TRANSDUCERS;

COMPUTATIONAL FLUID MECHANICS; DIFFERENTIAL PRESSURE METER; SILICON MICROSENSOR; SMART ORIFICE METER;

FLOWMETERS;

DESIGN; ORIFICE METER;

EID: 0032764276     PISSN: 09555986     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0955-5986(98)00037-5     Document Type: Article

References (10)

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8. H. Krassow, F. Campabadal, E. Lora-Tamayo. Flow restriction device with incorporated silicon pressure sensor for pressure-based flow meters, in: 8th International Fair and Congress for Sensors, Transducers and Systems: SENSOR'97, Proceedings, vol. 3, Nuremberg, Germany, 1997, pp.159-164.
9. B. Kloek, S.D. Collins, N.F. De Rooij, R.L. Smith, Study of electrochemical etch-stop for high-precision control of silicon membranes, IEEE Transactions on Electron Devices 36 (1989) 663-669.
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