Analytical techniques for examining reliability and failure mechanisms of barrier-coated encapsulated silicon pressure sensors exposed to harsh media

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2882, Issue , 1996, Pages 248-258

  Bitko, Gordon ^a   Monk, David J ^a   Maudie, Theresa ^a   Stanerson, Dennis ^a   Wertz, John ^a   Matkin, Jeanene ^a   Petrovic, Slobodan ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARRIER COATINGS; ENCAPSULATED DEVICES; MEDIA COMPATIBILITY;

COATINGS; CORROSION; FAILURE ANALYSIS; RELIABILITY; SEMICONDUCTING SILICON; SENSORS;

PRESSURE MEASUREMENT;

EID: 0030380733     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (52)