Direct nanomolding of semiconductor single crystals

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 39, Issue 3 A/B, 2000, Pages

  Masuda, Hideki ^a   Yasui, Kenji ^a   Yanagishita, Takashi ^a   Nakao, Masashi ^b   Tamamura, Toshiaki ^c   Nishio, Kazuyuki ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

^b NTT CORPORATION   (Japan)

^c Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; INORGANIC ACIDS; MOLDING; MOLDS; NANOTECHNOLOGY; SEMICONDUCTING INDIUM PHOSPHIDE; SILICON CARBIDE; TEXTURES;

DIRECT NANOMOLDING; SEMICONDUCTOR SINGLE CRYSTALS;

SINGLE CRYSTALS;

EID: 0033751239     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.l256     Document Type: Article

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