Negative cluster ions in sputtering of Si, SiC and graphite: Abundance distributions, energy spectra and fragmentation processes

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 164, Issue , 2000, Pages 705-714

  Gnaser, Hubert ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

GRAPHITE; ION BOMBARDMENT; MASS SPECTROMETRY; NEGATIVE IONS; SILICON; SILICON CARBIDE; SPECTRUM ANALYSIS;

FRAGMENTATION; UNIMOLECULAR DECOMPOSITION;

SPUTTERING;

EID: 0033748635     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)01116-7     Document Type: Article

References (38)

1. P. Sigmund (Ed.), Fundamental Processes in Sputtering of Atoms and Molecules, K. Dan. Vidensk. Selsk. Mat. Fys. Medd. 43 (1993).
2. Andersen H.H. Vacuum. 39:1989;1095.
3. W.O. Hofer, in: R. Behrisch, K. Wittmaack (Eds.), Sputtering by Particle Bombardment III, Springer, Berlin, 1991, p. 15.
4. B.U.R. Sundqvist, in: R. Behrisch, K. Wittmaack (Eds.), Sputtering by Particle Bombardment III, Springer, Berlin, 1991, p. 257.
5. Urbassek H.M., Hofer W.O. K. Dan. Vidensk. Selsk. Mat. Fys. Medd. 43:1993;97.
6. Ens W., Beavis R., Standing K.G. Phys. Rev. Lett. 50:1983;27.
7. Begemann W., Meiwes-Broer K.H., Lutz H.O. Phys. Rev. Lett. 56:1986;2248.
8. Dzhemilev N.K., Verkhoturov S.V., Veriovkin I.V. Nucl. Instr. and Meth. B. 51:1990;219.
9. Delcorte A., Segda B.G., Bertrand P. Surf. Sci. 381:1997;18.
10. Delcorte A., Segda B.G., Bertrand P. Surf. Sci. 389:1997;393.
11. Delcorte A., Bertrand P. Int. J. Mass Spectrom. 184:1999;217.
12. Wucher A., Garrison B.J. Phys. Rev. B. 46:1992;4855.
13. Wucher A., Garrison B.J. J. Chem. Phys. 105:1996;5999.
14. Dzhemilev N.K., Goldenberg A.M., Veriovkin I.V., Verkhoturov S.V. Int. J. Mass Spectrom. Ion Proc. 107:1991;R19.
15. Dzhemilev N.K., Goldenberg A.M., Veriovkin I.V., Verkhoturov S.V. Int. J. Mass Spectrom. Ion Proc. 141:1995;209.
16. Dzhemilev N.K., Goldenberg A.M., Veriovkin I.V., Verkhoturov S.V. Nucl. Instr. and Meth. B. 114:1996;245.
17. Wucher A., Bekkerman A.D., Dzhemilev N.K., Verkhoturov S.V., Veryovkin I.V. Nucl. Instr. and Meth. B. 140:1998;311.
18. Harrison D.E., Delaplain C.B. J. Appl. Phys. 47:1976;2252.
19. Garrison B.J., Winograd N., Harrison D.E. J. Chem. Phys. 69:1978;1440.
20. Garrison B.J., Winograd N., Harrison D.E. Phys. Rev. B. 18:1978;6000.
21. Betz G., Husinsky W. Nucl. Instr. and Meth. B. 102:1995;281.
22. Hartman J.W., Shapiro M.H., Tombrello T.A. Nucl. Instr. and Meth. B. 124:1997;31.
23. Hartman J.W., Shapiro M.H., Tombrello T.A. Nucl. Instr. and Meth. B. 132:1997;406.
24. Gnaser H. Nucl. Instr. and Meth. B. 149:1999;38.
25. H.N. Migeon, C. Le Pipec, J.J. Le Goux, in: A. Benninghoven, R.J. Colton, D.S. Simons, H.W. Werner (Eds.), Secondary Ion Mmass Spectrometry SIMS V, Springer, Berlin, 1986, p. 155.
26. Gnaser H. Phys. Rev. B. 54:1996;16456.
27. M.L. Yu, in: R. Behrisch, K. Wittmaack (Eds.), Sputtering by Particle Bombardment III, Springer, Berlin, 1991, p. 91.
28. Yang S., Taylor K.J., Craycraft M.J., Conceicao J., Pettiette C.L., Cheshnovsky O., Smalley R.E. Chem. Phys. Lett. 144:1988;431.
29. Arnold D.W., Bradforth S.E., Kitsopoulos T.N., Neumark D.M. J. Chem. Phys. 95:1991;8753.
30. Cheshnovsky O., Yang S.H., Pettiette C.L., Craycraft M.J., Liu Y., Smalley R.E. Chem. Phys. Lett. 138:1987;119.
31. H. Gnaser, Phys. Rev. A 60 (1999) R2645.
32. Raghavachari K., Rohlfing C.M. J. Chem. Phys. 94:1991;3670.
33. Bréchignac C., Cahuzac P., Leygnier J., Weiner J. J. Chem. Phys. 90:1989;1492.
34. Haberland H., Kornmeier H., Langosch H., Oschwald M., Tanner G. J. Chem. Faraday Trans. 86:1990;2473.
35. Forst W. Theory of Unimolecular Reactions. 1973;Academic, New York.
36. Raghavachari K., Rohlfing C.M. J. Chem. Phys. 89:1988;2219.
37. Raghavachari K., Rohlfing C.M. Chem. Phys. Lett. 143:1988;428.
38. Andreoni W., Pastore G. Phys. Rev. B. 41:1990;10243.