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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 7 B, 1999, Pages 4423-4428

Numerical study of a collision-dominated inductively coupled plasma using particle-in-cell/Monte Carlo simulation

(2) Oh, Jin Sung a Makabe, Toshiaki a

a KEIO UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC FIELDS; ELECTRIC HEATING; ELECTRONS; HEAVY IONS; MONTE CARLO METHODS; NUCLEAR REACTORS; PLASMA SHEATHS;

ELECTRON HEATING; INDUCTIVELY COUPLED PLASMA; PARTICLE IN CELL;

PLASMA COLLISION PROCESSES;

EID: 0033157535 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.38.4423 Document Type: Article

Times cited : (1)

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