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Microelectronics Reliability

Volumn 40, Issue 4-5, 2000, Pages 567-570

The roles of charged and neutral oxidising species in silicon oxidation from ab initio calculations

(3) Szymanski, M A a Stoneham, A M a Shluger, A a

a UNIVERSITY COLLEGE LONDON (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; ELECTRON DIFFRACTION; OXIDATION; OXYGEN; SILICA;

CHARGED OXIDIZING SPECIES;

SEMICONDUCTING SILICON;

EID: 0033732534 PISSN: 00262714 EISSN: None Source Type: Journal
DOI: 10.1016/S0026-2714(99)00259-0 Document Type: Article

Times cited : (20)

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