Measurement of hydrogen content in diamond like carbon thin films by ERDA

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 118, Issue 1-4, 1996, Pages 312-317

  Konishi, Y ^a   Konishi, I ^a   Sakauchi, N ^a   Hayashi, S ^a   Hirakimoto, A ^a   Suzuki, J ^a  

^a SHIMADZU CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; CONCENTRATION (PROCESS); ELECTRON CYCLOTRON RESONANCE; FILM PREPARATION; HYDROGEN; ION BEAMS; MEASUREMENTS; THIN FILMS;

DIAMOND LIKE CARBON THIN FILMS; ELASTIC RECOIL DETECTION ANALYSIS; HYDROGEN CONCENTRATION MEASUREMENT;

PARTICLE DETECTORS;

EID: 0030565118     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01098-X     Document Type: Article

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