Positional error compensation of a precision microstage

Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao

Volumn 19, Issue 6, 1998, Pages 543-548

  Fan, Kuang chao ^a   Lin, Chin yu ^a   Shyu, Lih hung ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; ERROR COMPENSATION; MATHEMATICAL MODELS;

MICROSTAGE;

POSITION CONTROL;

EID: 0032291291     PISSN: 02579731     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)