Capabilities and limitations of interference microscopy for two-and three-dimensional surface-measuring technology

Measurement: Journal of the International Measurement Confederation

Volumn 19, Issue 2, 1996, Pages 95-102

  Hillmann, W ^a   Brand, U ^a   Krystek, M ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Bandwidth limitation; Interference microscopy; Measurement standard; Surface measurement; Testing

Indexed keywords

INSTRUMENTS; MICROSCOPES; ROUGHNESS MEASUREMENT; STANDARDS; SURFACE MEASUREMENT; TESTING; THREE DIMENSIONAL;

INTERFERENCE MICROSCOPES; INTERFERENCE MICROSCOPY; RECTANGULAR PROFILES; STYLUS INSTRUMENT;

MICROSCOPIC EXAMINATION;

EID: 0030260553     PISSN: 02632241     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0263-2241(96)00069-3     Document Type: Article

References (18)

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