Development of optical noncontact sensor for measurement of three-dimensional profiles using depolarized components of scattered light

Optical Engineering

Volumn 36, Issue 1, 1997, Pages 227-234

  Mashimo, Kanji ^a,b,d,e,f   Nakamura, Tetsuya ^b,e,g   Tanimura, Yoshihisa ^a,c,f,h,i  

^a SPIE   (Japan)

^b Pharmaceutical Research Laboratory   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^d GUNMA UNIVERSITY   (Japan)

^e Gunma Prefectual Indust Technol R   (Japan)

^f Japan Society for Precision Engineering   (Japan)

^g IBARAKI UNIVERSITY   (Japan)

^h TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

ⁱ Mechanical Metrology Department

Author keywords

Astigmatic focus error; Depolarization; Free form surface; Linearly polarized light; Optical noncontact measurement; Three dimensional profile; Triangulation

Indexed keywords

EID: 0039691419     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601164     Document Type: Article

References (7)

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