Micromachine scanning tunneling microscope for nanoscale characterization and fabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2879, Issue , 1996, Pages 327-331

  Wada, Y ^a   Lutwyche, M ^a   Ishibashi, M ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

NANOSCALE TECHNOLOGY;

CHARACTERIZATION; FABRICATION; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING SILICON; TECHNOLOGY; ULSI CIRCUITS;

MICROMACHINING;

EID: 0030401244     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)