Determination of optical properties of fluorocarbon polymer thin films by a variable angle spectroscopic ellipsometry

Materials Research Society Symposium - Proceedings

Volumn 588, Issue , 2000, Pages 297-302

  Lee, Kang Kuk ^a   Park, Jin Goo ^a   Shin, Hyung Jae ^b  

^a Hanyang University   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COATED MATERIALS; COMPUTER SIMULATION; ELLIPSOMETRY; FLUOROCARBONS; LIGHT EXTINCTION; ORGANIC POLYMERS; REFRACTIVE INDEX; REGRESSION ANALYSIS; SPECTROSCOPIC ANALYSIS; SURFACE ROUGHNESS; VAPOR DEPOSITION;

BRUGGEMAN EFFECTIVE MEDIUM APPROXIMATION; CAUCHY MODEL; ELLIPSOMETRIC SPECTRA; LORENTZ MODEL; MEAN SQUARED ERROR; SILICON SUBSTRATES; VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY;

THIN FILMS;

EID: 0033700049     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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