Electrode dependences of switching endurance properties of lead-zirconate-titanate thin-film capacitors

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 4 A, 1996, Pages 2210-2215

  Aoki, Katsuhiro ^a   Fukuda, Yukio ^a   Numata, Ken ^a   Nishimura, Akitoshi ^a  

^a Texas Instruments Japan Ltd   (Japan)

Author keywords

Depletion layer; Fatigue; PZT; Remanent polarization; Switching

Indexed keywords

CAPACITANCE; DEPOSITION; ELECTRIC PROPERTIES; ELECTRODES; FATIGUE OF MATERIALS; INTERFACES (MATERIALS); IRIDIUM; POLARIZATION; SEMICONDUCTING LEAD COMPOUNDS; SOL-GELS; SWITCHING; THIN FILM DEVICES;

BIPOLAR PULSE APPLICATION; DC BIASES; DEPLETION LAYER; LEAD ZIRCONATE TITANATE THIN FILM CAPACITORS; PULSE SWITCHING CHARACTERIZATION; REMANENT POLARIZATION; SWITCHING ENDURANCE PROPERTIES;

CAPACITORS;

EID: 0030123802     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.2210     Document Type: Article

References (12)

1. J. F. Scott and C. A. Araujo: Science 246 (1989) 1400.
2. R. Moazami, C. Hu and W. H. Shepherd: IEEE Trans. Electron Devices 39 (1992) 2044.
3. J. T. Evans and R. Womack: IEEE J. Solid-State Circuit 23 (1988) 1171.
4. V. I. Petrovsky, A. S. Sigov and K. A. Vorotilov: Integrat. Ferroelectr. 3 (1993) 59.
5. V. E. Wood, J. R. Busch, S. D. Ramamurthi and S. L. Swarts: J. Appl. Phys. 71 (1992) 4557.
6. K. D. Preston and G. H. Haertling: Appl. Phys. Lett. 60 (1992) 2831.
7. T. Nakamura, Y. Nakao, A. Kamisawa and H. Takasu: Appl. Phys. Lett. 65 (1994) 1552.
8. H. N. Al-Shareef, K. R. Bellur, A. I. Kingon and O. Auciello: Appl. Phys. Lett. 66 (1995) 239.
9. H. N. Al-Shareef, O. Auciello and A. I. Kingon: J. Appl. Phys. 77 (1995) 2146.
10. P. K. Larsen, R. Cuppens and G. J. M. Dormans: Sci. & Technol. Electroceram. Thin Films 284 (1995) 201.
11. K. Aoki, Y. Fukuda, K. Numata and A. Nishimura: Jpn. J. Appl. Phys. 34 (1995) 192.
12. R. Waser: J. Am. Ceram. Soc. 74 (1991) 1934.