Detection of CN radicals in DC nitrogen plasma used for deposition of CNx layers

Spectrochimica Acta - Part A: Molecular and Biomolecular Spectroscopy

Volumn 56, Issue 4, 2000, Pages 761-767

  Nemes, L ^a   Mohai, M ^a   Donko Z ^b   Bertoti I ^a  

^a CHEMICAL RESEARCH CENTER   (Hungary)

^b WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; COMPUTER SIMULATION; CYANIDES; EMISSION SPECTROSCOPY; GRAPHITE ELECTRODES; MOLECULAR STRUCTURE; MOLECULAR VIBRATIONS; SPUTTER DEPOSITION; STOICHIOMETRY;

CYANOGEN;

MOLECULAR SPECTROSCOPY;

CYANIDE; FREE RADICAL; NITROGEN;

ARTICLE; CHEMISTRY;

CYANIDES; FREE RADICALS; NITROGEN;

EID: 0033624716     PISSN: 13861425     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1386-1425(99)00159-6     Document Type: Article

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