In situ characterization of microcrystalline silicon by time resolved microwave conductivity

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 2, 1998, Pages 1001-1005

  Brenot, R ^a   Bulkin, P ^a   Roca I Cabarrocas, P ^a   Drevillon B ^a   Vanderhaghen, R ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

Lifetime; Microcrystalline silicon; Mobility

Indexed keywords

CARRIER CONCENTRATION; COMPUTER SIMULATION; CRYSTAL GROWTH; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC DISCHARGES; ELECTROMAGNETIC WAVE REFLECTION; ELECTRON CYCLOTRON RESONANCE; ELLIPSOMETRY; PULSED LASER APPLICATIONS; SEMICONDUCTING SILICON; SEMICONDUCTOR GROWTH; ULTRAVIOLET SPECTROSCOPY;

BIMOLECULAR RECOMBINATION; INTEGRATED DISTRIBUTED ELECTRON CYCLOTRON RESONANCE (IDECR) TECHNIQUE; MICROCRYSTALLINE MATERIALS; TIME RESOLVED MICROWAVE CONDUCTIVITY (TRMC);

SEMICONDUCTING FILMS;

EID: 0032065157     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00320-2     Document Type: Article

References (9)

1. K.L. Luke, L.-J. Cheng, J. Appl. Phys. 61 (1987) 2282.
2. A.B. Sproul, M.A. Green, A.W. Stephens, J. Appl. Phys. 72 (1992) 4161.
3. C. Swiatkowski, A. Sanders, K.-D. Buhre, M. Kunst, J. Appl. Phys. 78 (1995) 1763.
4. M. Kunst, A. Werner, J. Appl. Phys. 58 (1985) 2236.
5. C. Swiatkowski, M. Kunst, Appl. Phys. A 61 (1995) 623.
6. C. Haffer, M. Kunst, C. Swiatkowski, G. Seidelman, Appl. Surf. Sci. 63 (1993) 222.
7. B. Harbecke, Appl. Phys. B 39 (1986) 165.
8. P. Roca, S. Hamma, P. St'ahel, C. Longeaud, J.P. Kleider, R. Meaudre, M. Meaudre, Proc. of the 14th European Photovoltaic Solar Energy, to be published.
9. P. Bulkin, R. Brenot, B. Drévillon, R. Vanderhaghen, this conference.