Synthesis and characterization of C-N films by hot carbon filament CVD

Surface and Coatings Technology

Volumn 120-121, Issue , 1999, Pages 418-422

  Kitazawa, Nobuaki ^a   Kasai, Hiroshi ^a   Watanabe, Yoshihisa ^a   Nakamura, Yoshikazu ^a  

^a NATIONAL DEFENSE ACADEMY   (Japan)

Author keywords

Carbon films; Chemical vapor deposition; Hard coatings; Nitrogen

Indexed keywords

COATING; FILM; HARDNESS; VAPOR DEPOSITION;

EID: 0033509616     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00502-2     Document Type: Conference Paper

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