Synthesis of C-N films by hot carbon filament CVD

Materials Research Society Symposium - Proceedings

Volumn 498, Issue , 1997, Pages 289-294

  Watanabe, Yoshihisa ^a   Kasai, Hiroshi ^a   Kawasumi, Emi ^a   Amamoto, Yoshiki ^a   Nakamura, Yoshikazu ^a  

^a NATIONAL DEFENSE ACADEMY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CARBON; CHEMICAL VAPOR DEPOSITION; ELASTICITY; HARDNESS; MORPHOLOGY; NITROGEN; RAMAN SPECTROSCOPY; STRUCTURE (COMPOSITION); X RAY DIFFRACTION;

HOT FILAMENT CHEMICAL VAPOR DEPOSITION; NANOINDENTATION;

THIN FILMS;

EID: 0031389099     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-498-289     Document Type: Conference Paper

References (11)