Dynamic evaluation of surface damage mode transitions in carbon nitride coatings due to sliding contact with a spherical diamond

Wear

Volumn 225-229, Issue I, 1999, Pages 104-110

  Wang, Dong F ^a   Kato, Koji ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Coating thickness; Critical depth; Critical loads; Nitrogen incorporation parameters; Surface damage mode transitions

Indexed keywords

CARBON INORGANIC COMPOUNDS; DIAMONDS; HARDNESS; ION BEAMS; NITRIDES; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SILICON; SINGLE CRYSTALS; TRIBOLOGY; WEAR OF MATERIALS;

CARBON NITRIDE; NANOINDENTATION HARDNESS;

PROTECTIVE COATINGS;

CARBONITRIDING; CERAMIC COATING; DAMAGE; DIAMOND; SLIDING CONTACT;

EID: 0033499986     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0043-1648(98)00352-4     Document Type: Article

References (21)

1. R.S. Muller, Microdynamics, Sensors and Actuators A 21-23 (1990) 1-8.
2. K.J. Gabriel, F. Behi, R. Mahadevan, M. Mehregany, In-situ friction and wear measurements in integrated polysilicon mechanisms, Sensors and Actuators A 21-23 (1990) 184-188.
3. K. Deng, W.H. Ko, G.M. Michal, A preliminary study on friction measurements in MEMS, Proc. 6th Int. Conf. Solid State Sensors and Actuators, Transducers '91, San Fransisco, CA, 24-27 June 1991, pp. 213-216.
4. K. Komvopoulos, Surface engineering and microtribology for microelectromechanical systems, Wear 200 (1996) 305-327.
5. S. Suzuki, T. Matsuura, M. Uchizawa, S. Yura, H. Shibata, Friction and wear studies on lubricants and materials applicable to MEMS, Proc. IEEE Micro Electro Mechanical Systems, Nara, Japan, 30 January-2 February 1991, pp. 143-147.
6. K. Den, W.H. Ko, Application of diamond-like carbon film for microdynamic devices, Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, 22-25 June 1992, pp. 98-101.
7. M.R. Houston, R.T. Howe, K. Komvopoulos, R. Maboudian, Diamond-like carbon films for silicon passivation in microelectromechanical devices, Mater. Res. Soc. Symp. Proc. 383 (1995) 391-402.
8. A. Grill, Tribology of diamond-like carbon and related materials: an updated review, unpublished research report.
9. R. Prioli, S.I. Zanette, A.O. Caride, D.F. Franceschini, F.L. Freire Jr., Atomic force microscopy of amorphous hydrogenated carbon-nitrogen film deposited by radio-frequency-plasma decomposition of methane-ammonia gas mixtures, J. Vac. Sci. Technol. A 14 (4) (1996) 2351-2355.
10. J. Koskinen, J.P. Hirvonen, J. Levoska, P. Torri, Tribological characterization of carbon-nitrogen coatings deposited by using vacuum arc discharge, Diamond and Related Materials 5 (1996) 669-673.
11. E.C. Cutiongco, D. Li, Y.W. Chung, C.S. Bhatia, Tribological behavior of amorphous carbon nitride overcoats for magnetic thin-film regid disks, J. Tribol. 118 (1996) 543-548.
12. A. Khurshudov, K. Kato, D. Sawada, Microtribological characterization of carbon nitride coatings, Tribol. Lett. 2 (1996) 13-21.
13. x films prepared by reactive DC magnetron sputtering, Wear 213 (1997) 80-89.
14. M.F. Doerner, W.D. Nix, A method for interpreting the data from depth-sensing indentation instruments, Journal of Materials Research 1 (4) (1986) 601-609.
15. K. Holmberg, A. Matthews, Coatings tribology, in: D. Dowson (Ed.), Tribology Series, Vol. 28, Elsevier, 1994.
16. D.F. Wang, K. Kato, N. Umehara, Mechanical characterization of ion beam assisted carbon nitride coatings, to be presented at the 26th Int. Conf. on Metallurgical Coatings and Thin Films (ICMCTF'99), San Diego, CA, USA, April 12-16, 1999.
17. S.J. Bull, Failure mode maps in the thin film scratch adhesion test, Tribol. Inter. 30 (7) (1997) 491-498.
18. B.K. Gupta, B. Bhushan, Micromechanical properties of amorphous carbon coatings deposited by different deposition techniques, Thin Solid Films 270 (1995) 391-398.
19. D.F. Diao, K. Kato, K. Hayashi, The local yield map of hard coating under sliding contact, in: D. Dowson et al. (Eds.), Thin Films in Tribology, pp. 419-427, 1993.
20. D.S. Rickerby, A. Matthews (Eds.), Advanced Surface Coatings, A Handbook of Surface Engineering, Blackie and Son, NY, 1991.
21. P. Kodali, K.C. Walter, M. Nastasi, Investigation of mechanical and tribological properties of amorphous diamond-like carbon coatings, Tribol. Inter. 30 (8) (1997) 591-598.