Dominance of electron-stimulated desorption neutral species in ultra-high vacuum pressure measurements

Vacuum

Volumn 52, Issue 3, 1999, Pages 333-338

  Watanabe, Fumio ^a  

^a Tsukuba Laboratory   (Japan)

Author keywords

ESD; Neutral ESD; Platinum grid; UHV gauge; UHV RGA

Indexed keywords

DESORPTION; MASS SPECTROMETRY; PARTIAL PRESSURE; PLATINUM; PRESSURE GAGES; PRESSURE MEASUREMENT;

ELECTRON STIMULATED DESORPTION; ENERGY DISPERSIVE RESIDUAL GAS ANALYZERS;

VACUUM GAGES;

EID: 0033097753     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(98)00314-5     Document Type: Article

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