Improvement of the performance of the ionization gauge with energy filter for the measurement of an extremely high vacuum

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 561-565

  Akimichi, H ^a   Takahashi, N ^a   Tanaka, T ^a   Takeuchi, K ^a   Tuzi, Y ^a   Arakawa, I ^b  

^a ULVAC INC   (Japan)

^b GAKUSHUIN UNIVERSITY   (Japan)

Author keywords

Energy filter; Extreme high vacuum ionization gauge; Pressure measurement

Indexed keywords

ARGON; DESORPTION; ELECTRODES; ELECTROMAGNETIC WAVE REFLECTION; ELECTRON MULTIPLIERS; GASES; HYDROGEN; ION SOURCES; IONIZATION; IONS; VACUUM TECHNOLOGY; X RAYS;

ELECTRON STIMULATED DESORPTION; ENERGY FILTER; EXTREMELY HIGH VACUUM; HOT FILAMENT IONIZATION GAUGE; ION TRANSMISSION;

PRESSURE MEASUREMENT;

EID: 0030170027     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207X(96)00020-6     Document Type: Article

References (9)

1. H Akimichi, T Tanaka, K Takeuchi, Y Tuzi and I Arakawa, J Vac Soc Jpn, 37, 267 (1994) (in Japanese).
2. H Akimichi, T Tanaka, K Takeuchi, Y Tuzi and I Arakawa, J Vac Soc Jpn, 37, 782 (1994) (in Japanese).
3. H Akimichi, T Tanaka, K Takeuchi, Y Tuzi and I Arakawa, Vacuum, 46, 749 (1995).
4. H Akimichi, T Tanaka, K Takeuchi, Y Tuzi and I Arakawa, J Vac Soc Jpn, 38, 166 (1995) in Japanese.
5. H Akimichi, N Takahashi, K Takeuchi, Y Tuzi and I Arakawa, J Vac Soc Jpn, 38, 789 (1995) (in Japanese).
6. J D Allen et al., J Electron Spectrosc, 8, 395 (1976).
7. J H Craig Jr and J H Hock, J Vac Sci Technol, 17, 1360 (1980).
8. W B Nottingham, 1954 1st Vac Symp Trans (1955) p 76.
9. SIMION, D A Dahl and J E Delmore, Idaho National Engineering Laboratory, Idaho Falls, ID83415.