Simulations and experimental study on decoupling of gas phase ions from ESD ions using an energy analyzer in the RGA

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 587-590

  Watanabe, S ^a   Aono, M ^a   Kato, S ^b  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^b HIGH ENERGY ACCELERATOR RESEARCH ORGANIZATION KEK   (Japan)

Author keywords

Computer simulation; Energy analyzer; ESD ions; Gas phase ions; Kinetic energy; Trajectories of ions

Indexed keywords

COMPUTER SIMULATION; DESORPTION; ELECTRONS; HIGH PRESSURE ENGINEERING; ION SOURCES; IONS; PRESSURE GAGES;

DECOUPLING; ELECTRON STIMULATED DESORPTION; ELECTRON STIMULATED DESORPTION IONS; ENERGY ANALYZER; EXTREMELY HIGH VACUUM; GAS PHASE IONS; IONIZATION GAUGE; KINETIC ENERGY; RESIDUAL GAS ANALYZER;

PRESSURE MEASUREMENT;

EID: 0030167787     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00145-5     Document Type: Article

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