Hysteresis of electron-stimulated desorption in an ion spectroscopy gauge

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 583-586

  Watanabe, Fumio ^a  

^a Tsukuba Laboratory   (Japan)

Author keywords

ESD; Hot cathode ion gauge; Hysteresis; Ion spectroscopy gauge; Pt grid

Indexed keywords

DEGASSING; DESORPTION; ELECTRONS; HYSTERESIS; MOLECULES; PLATINUM; PRESSURE GAGES; SPECTROSCOPY; WATER;

ELECTRON STIMULATED DESORPTION; HOT CATHODE ION GAUGE; HOT CATHODE IONIZER; ION SPECTROSCOPY GAUGE; PLATINUM GRID;

PRESSURE MEASUREMENT;

EID: 0030168691     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00025-5     Document Type: Article

References (4)

1. F Watanabe, J Vac Sci Technol, A10, 3333 (1992).
2. F Watanabe, J Vac Sci Technol, A11, 1620 (1993).
3. F Watanabe, Y Koyatsu and H Miki, J Vac Sci Technol, A13, 2587 (1995).
4. F Watanabe and A Kasai, J Vac Sci Technol, A13, 497 (1995).