Mechanical properties and residual stress in AlN/Al mixed films prepared by ion-beam-assisted deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 2, 1999, Pages 603-607

  Watanabe, Yoshihisa ^a   Uchiyama, Shingo ^a   Nakamura, Yoshikazu ^a   Li, Chunlang ^b   Sekino, Tohru ^b   Niihara, Koichi ^b  

^a NATIONAL DEFENSE ACADEMY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033423037     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582034     Document Type: Article

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