Hydrogen reactions with electron irradiation damage in silicon

Physica B: Condensed Matter

Volumn 273-274, Issue , 1999, Pages 243-246

  Peaker, A R ^a,b   Evans Freeman, J H ^a   Kan, P Y Y ^a   Rubaldo, L ^b   Hawkins, I D ^a   Vernon Parry, K D ^a   Dobaczewski, L ^c  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

^b CNRS   (France)

^c INSTITUTE OF PHYSICS   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

DEEP LEVEL TRANSIENT SPECTROSCOPY; ELECTRON IRRADIATION; HYDROGEN;

DEPTH PROFILING;

SEMICONDUCTING SILICON;

EID: 0033357057     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(99)00463-9     Document Type: Article

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