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Physica B: Condensed Matter

Volumn 273-274, Issue , 1999, Pages 1015-1021

Electron spin resonance study of the interaction of hydrogen with the (111)Si/SiO2 interface: Pb-hydrogen interaction kinetics

(1) Stesmans, A a

a UNIVERSITY OF LEUVEN (Belgium)

Author keywords

Defects; Magnetic resonance; Si SiO2 interface; Silicon

Indexed keywords

ACTIVATION ENERGY; CRYSTAL DEFECTS; DISSOCIATION; INTERFACES (MATERIALS); PARAMAGNETIC RESONANCE; PASSIVATION; REACTION KINETICS; SILICA; SILICON;

EXPONENTIAL DECAY; THERMAL INTERACTION KINETICS;

MOS DEVICES;

EID: 0033350468 PISSN: 09214526 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-4526(99)00627-4 Document Type: Article

Times cited : (8)

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