Optically detected magnetic resonance studies of intrinsic defects in 6H-SiC

Semiconductor Science and Technology

Volumn 14, Issue 12, 1999, Pages 1141-1146

  Son, N T ^a   Hai, P N ^a   Wagner, Mt ^a   Chen, W M ^a   Ellison, A ^a   Hallin, C ^a,b   Monemar, B ^a   Janzen E ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b ABB CORPORATE RESEARCH   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MAGNETIC RESONANCE;

OPTICALLY DETECTED MAGNETIC RESONANCE (ODMR);

SILICON CARBIDE;

EID: 0033337170     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/14/12/323     Document Type: Article

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