Sputtering of PZT thin films for surface micromachined IR-detector arrays

Integrated Ferroelectrics

Volumn 25, Issue 1-4, 1999, Pages 1-11

  Bruchhaus, R ^a   Pitzer, D ^a   Primig, R ^a   Schreiter, M ^a   Wersing, W ^a  

^a SIEMENS AG   (Germany)

Author keywords

Imprint; Pyroelectric IR detector arrays; PZT thin films; Self polarization; Sputtering; Voltage shifts

Indexed keywords

ELECTRODES; FERROELECTRIC DEVICES; HEAT TREATMENT; HIGH TEMPERATURE OPERATIONS; INFRARED DETECTORS; MEMBRANES; PERMITTIVITY; PLATINUM; PYROELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS; SPUTTER DEPOSITION;

CURIE POINT; LOW STRESS FERROELECTRIC CAPACITOR STACKS; PYROELECTRIC DETECTOR; SURFACE MICROMACHINED INFRARED DETECTOR ARRAYS;

THIN FILMS;

EID: 0033331636     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589908210154     Document Type: Article

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