Fabrication of multilayer ferroelectric films

Integrated Ferroelectrics

Volumn 25, Issue 1-4, 1999, Pages 275-286

  Neumayer, Deborah A ^a   Duncombe, Peter R ^a   Laibowitz, Robert B ^a   Shaw, Thomas ^a   Berndt, Lisa ^a   Black, C T ^a   Grill, Alfred ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

Bismuth titanate; Chemical solution deposition; Ferroelectric; Strontium bismuth tantalate

Indexed keywords

BISMUTH COMPOUNDS; CAPACITORS; DEPOSITION; ELECTRIC VARIABLES MEASUREMENT; FATIGUE OF MATERIALS; FERROELECTRIC MATERIALS; FERROELECTRICITY; FILM PREPARATION; MIXTURES; RAPID THERMAL ANNEALING; STRONTIUM COMPOUNDS;

BISMUTH TITANATE; CHEMICAL SOLUTION DEPOSITION; STRONTIUM BISMUTH NIOBATE; STRONTIUM BISMUTH TANTALATE;

MULTILAYERS;

EID: 0033330925     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589908210178     Document Type: Article

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